By Joel A. Kubby
Even if you're a scholar taking an introductory MEMS path or a training engineer who must wake up to hurry fast on MEMS layout, this sensible advisor offers the hands-on adventure had to layout, fabricate and try out MEMS units. you'll find out how to use foundry multi-project fabrication procedures for reasonably cheap MEMS tasks, in addition to computer-aided layout instruments (layout, modeling) that may be used for the layout of MEMS units. a variety of layout examples are defined and analysed, from fields together with micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. there is additionally a last bankruptcy on packaging and checking out MEMS units, besides and workouts and layout demanding situations on the finish of each bankruptcy. suggestions to the layout problem difficulties are supplied online
''Whether you're a scholar taking an introductory MEMS path or a training engineer who must wake up to hurry fast on MEMS layout, this useful consultant offers the hands-on adventure had to layout, fabricate and try MEMS units. you are going to how to use foundry multi-project fabrication strategies for inexpensive MEMS initiatives, in addition to computer-aided layout instruments (layout, modeling) that may be used for the layout of MEMS units. a variety of layout examples are defined and analysed, from fields together with micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. there is additionally a last bankruptcy on packaging and trying out MEMS units, in addition and workouts and layout demanding situations on the finish of each bankruptcy. extra assets are supplied on-line, together with strategies to the layout problem difficulties and a variety of case reviews of MEMS devices''-- Read more... computer generated contents word: 1. advent; 2. Micro-mechanics; three. Electrostatics; four. Optical MEMS; five. Thermal MEMS; 6. Fluidic MEMS; 7. package deal and try out; eight. From prototype to product: MEMS deformable mirrors for adaptive optics
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Additional resources for A guide to hands-on MEMS design and prototyping
Middle) Lateral motion gives rise to a viscous force. (Bottom) Rotational motion causes both squeezed film dampening and viscous dampening. (Reprinted with permission from Prof. 10 Accelerometer 49 between a released member and the substrate, like a piston; move through air, like a wing; or force air from one position to another, like a compressor. 17 (right). If the air is compressed rather than displaced, the air film can act as a spring. 10 Accelerometer An accelerometer is essentially a mass on a spring.
Helmbrecht, M. Hart, and T. Juneau, Advanced wavefront correction technology for the next generation of adaptive optics equipped ophthalmic instrumentation, Proc. SPIE 5688, pp. 125–132 (2005). 18 R. Wood, V. Dhuler, and E. Hill, A MEMS variable optical attenuator, Proc. IEEE/LEOS Int’l Conf. Opt. MEMS, Kauai, HI, Aug. 2000, pp. 121–222 (2000). A. Kubby on behalf of the MOEMS Manufacturing Consortium, Hybrid integration of light emitters and detectors with SOI-based micro-opto-electro-mechanical (MOEMS) systems, Proc.
The resonant gate transistor, IEEE Trans. Electron Devices 14, p. 117 (1967). W. J. Gabriel, MEMS: The systems function revolution, IEEE Trans. Electron Devices 14, pp. 25–31 (1999). T. S. Muller, Polycrystalline silicon micro-mechanical beams, Proc. Electrochemical Society Spring Meeting, Montreal, Quebec, Canada, May 9–14, pp. 184–185 (1982). M. T. S. Muller, Surface micromachining for microelectromechanical systems, Proc. IEEE 86(8), pp. 1552–1574 (1998). html (last accessed on 3–17–2010).
A guide to hands-on MEMS design and prototyping by Joel A. Kubby